Design and fabrication of fresnel lens and ZnO thin-film transducer

Min Chun Pan; Tuan Anh Bui; Yu Chuan Nien; Wen Ching Shih

doi:10.1143/JJAP.50.07HD02

Design and fabrication of fresnel lens and ZnO thin-film transducer

Min Chun Pan, Tuan Anh Bui, Yu Chuan Nien, Wen Ching Shih

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/ SiO₂/Si substrates under reasonable conditions, such as RF power of 178W, substrate temperature of 380°C, deposition pressure of 10m Torr, and Ar:O₂ gas flow ratio of 50%. These conditions were applied and confirmed through investigating the influence of deposition parameters on the properties of ZnO films.

Original language	English
Article number	07HD02
Journal	Japanese Journal of Applied Physics
Volume	50
Issue number	7 PART 2
DOIs	https://doi.org/10.1143/JJAP.50.07HD02
State	Published - Jul 2011

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abstract = "A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/ SiO2/Si substrates under reasonable conditions, such as RF power of 178W, substrate temperature of 380°C, deposition pressure of 10m Torr, and Ar:O2 gas flow ratio of 50%. These conditions were applied and confirmed through investigating the influence of deposition parameters on the properties of ZnO films.",

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AU - Bui, Tuan Anh

AU - Nien, Yu Chuan

AU - Shih, Wen Ching

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N2 - A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/ SiO2/Si substrates under reasonable conditions, such as RF power of 178W, substrate temperature of 380°C, deposition pressure of 10m Torr, and Ar:O2 gas flow ratio of 50%. These conditions were applied and confirmed through investigating the influence of deposition parameters on the properties of ZnO films.

AB - A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/ SiO2/Si substrates under reasonable conditions, such as RF power of 178W, substrate temperature of 380°C, deposition pressure of 10m Torr, and Ar:O2 gas flow ratio of 50%. These conditions were applied and confirmed through investigating the influence of deposition parameters on the properties of ZnO films.

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M3 - 期刊論文

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VL - 50

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 7 PART 2

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Design and fabrication of fresnel lens and ZnO thin-film transducer

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