Design and fabrication of fresnel lens and ZnO thin-film transducer

Min Chun Pan, Tuan Anh Bui, Yu Chuan Nien, Wen Ching Shih

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/ SiO2/Si substrates under reasonable conditions, such as RF power of 178W, substrate temperature of 380°C, deposition pressure of 10m Torr, and Ar:O2 gas flow ratio of 50%. These conditions were applied and confirmed through investigating the influence of deposition parameters on the properties of ZnO films.

Original languageEnglish
Article number07HD02
JournalJapanese Journal of Applied Physics
Issue number7 PART 2
StatePublished - Jul 2011


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