Design and construction of linear laser encoders that possess high tolerance of mechanical runout

Chih Kung Lee, Chyan Chyi Wu, Shih Jui Chen, Liang Bin Yu, You Chia Chang, Yeong Feng Wang, Jau Yu Chen, Jeremy Wen Jong Wu

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

A linearly diffracted laser encoder that has high tolerance of head-to-scale misalignment and a high signal-to-noise ratio is described. The preservation of parallelism between the incident and the diffracted beams, which can be attributed to a built-in folded IX telescope, allows for the high alignment tolerance. It can be shown that, by coupling this newly developed circular polarization interferometer configuration with grating scale geometry optimization, one can eliminate the problems associated with signal distortion that arise from various efficiencies of the p- and the s-polarized light beams and obtain a high signal-to-noise ratio. Both theoretical and experimental results are presented to confirm the improved results and performance.

Original languageEnglish
Pages (from-to)5754-5762
Number of pages9
JournalApplied Optics
Volume43
Issue number31
DOIs
StatePublished - 1 Nov 2004

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