Deposition of high-quality Ge film on Si by PECVD using GeCl4/H2 for fabricating near-infrared photodiodes

  • Jyun You Lai
  • , Shang Che Tsai
  • , Ming Wei Lin
  • , Szu yuan Chen

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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Engineering

Material Science

Chemical Engineering