Deposition of GeSn film on Si substrate by plasma-enhanced chemical vapor deposition using GeCl4 and SnCl4 in H2 for developing short-wave infrared Si photonics
Tzu Hung Yang, Zhe Zhang Lin, Shang Che Tsai, Jia Zhi Dai, Shih Ming Chen, Ming Wei Lin, Szu yuan Chen
Research output: Contribution to journal › Article › peer-review
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