Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method

Chao Wei Tsai, Chau Hwang Lee, Jyhpyng Wang

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

In profilometric measurements, by scanning the sample twice with a fixed vertical offset, one can separate the signal that comes from surface heterogeneity from the topographic signal. Using differential confocal microscopy, a newly developed open-loop nanometer profilometric technique, we demonstrated this dual-scan method on composite samples and obtained 10-nm depth resolution. This technique can also be applied to other profilometric techniques such as atomic force microscopy and scanning tunneling microscopy.

Original languageEnglish
Pages (from-to)1732-1734
Number of pages3
JournalOptics Letters
Volume24
Issue number23
DOIs
StatePublished - 1 Dec 1999

Fingerprint

Dive into the research topics of 'Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method'. Together they form a unique fingerprint.

Cite this