Damage of silicon induced by low-energy Ar magnetron discharges

Keyphrases

• Low Energy 100%
• Magnetron Discharge 100%
• Capacitance-voltage 50%
• Argon 50%
• Surface Traps 50%
• No Damage 50%
• Glow Discharge 50%
• Physical Damage 50%
• High-low Frequency 50%
• Trap Density 50%
• Damage Degree 50%
• RF Discharge 50%
• Ion Energy 50%
• Milling System 50%
• Ion Milling 50%
• DC Discharge 50%

Physics

• Magnetron 100%
• Glow Discharge 50%