Correlation of impedance matching and optical emission spectroscopy during plasma-enhanced chemical vapor deposition of nanocrystalline silicon thin films

Li Han Kau, Hung Jui Huang, Hsueh Er Chang, Yu Lin Hsieh, Chien Chieh Lee, Yiin Kuen Fuh, Tomi T. Li

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'Correlation of impedance matching and optical emission spectroscopy during plasma-enhanced chemical vapor deposition of nanocrystalline silicon thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds