Correlation of impedance matching and optical emission spectroscopy during plasma-enhanced chemical vapor deposition of nanocrystalline silicon thin films

Engineering & Materials Science

• Nanocrystalline silicon 100%
• Optical emission spectroscopy 89%
• Plasma enhanced chemical vapor deposition 76%
• Thin films 50%
• Plasmas 49%
• Dilution 39%
• Hydrogen 28%
• Nanocrystals 26%
• Mass spectrometry 23%
• Phase transitions 18%
• Transmission electron microscopy 18%
• Silicon 14%
• Acoustic impedance 13%

Physics & Astronomy

• impedance matching 66%
• optical emission spectroscopy 61%
• vapor deposition 41%
• silicon 28%
• thin films 27%
• dilution 26%
• hydrogen 16%
• mass spectroscopy 13%
• light emission 12%
• optical spectrum 12%
• nanocrystals 11%
• emission spectra 11%
• phase transformations 11%
• impedance 10%
• transmission electron microscopy 8%
• thresholds 8%
• characterization 7%

Chemical Compounds

• Optical Emission Spectroscopy 67%
• Plasma Enhanced Chemical Vapour Deposition 64%
• Plasma 33%
• Nanocrystallinity 30%
• Dilution 29%
• Hydrogen 18%
• Emission Spectrum 15%
• Nanocrystal 14%
• Mass Spectrometry 11%
• Transmission Electron Microscopy 11%