Controlling the feature size made by two-photon photopolymerization in a threshold material

Ting Wei Chang, Hong Yao Mong, Jiunn Yuan Lin, Jyhpyng Wang, Chau Hwang Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The feature size made by two-photon photopolymerization is described by a threshold model. In a negative photoresist SU-8 we show the linewidth fabricated by this nonlinear process is consistent with the prediction of this model.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2003
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)1557527334
StatePublished - 2003
EventConference on Lasers and Electro-Optics, CLEO 2003 - Baltimore, United States
Duration: 1 Jun 20036 Jun 2003

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceConference on Lasers and Electro-Optics, CLEO 2003
Country/TerritoryUnited States
CityBaltimore
Period1/06/036/06/03

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