Controllable photonic mirror fabricated by the atomic layer deposition on the nanosphere template

Shih Hao Chan, Wei Ting Lin, Wen Hao Cho, Chien Cheng Kuo, Cheng Chung Lee, Sheng Hui Chen

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

In this study, a controllable photonic mirror was fabricated using the atomic layer deposition (ALD) coating technique on a polystyrene (PS) nanosphere template. PS nanospheres were self-assembled on an Al/glass substrate to form the bottom electrode. A 20 nm ALD Al2O3film was then coated onto the surface of the reduced PS nanosphere structure. The PS nanospheres were removed in air at 350°C to form hollow Al2O3nanospheres. Then a 30 nm indium tin oxide film was sputtered on the hollow nanosphere structure to form the top electrode. The results show that the incorporation of the photonic mirror could control the reflectance to a value of 0.3% per 0.1 V of bias voltage.

Original languageEnglish
Pages (from-to)A237-A241
JournalApplied Optics
Issue number4
DOIs
StatePublished - 1 Feb 2014

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