Compositional inhomogeneities in InGaN/GaN quantum wells studied with high resolution transmission electron microscopy

Yen Sheng Lin, Chen Hsu, Kung Jeng Ma, Shih Wei Feng, Chi Chih Liao, C. C. Yang, Chang Cheng Chou, Chia Ming Lee, Jen Inn Chyi

Research output: Contribution to journalArticlepeer-review

Abstract

The information on variations in indium composition, aggregation size, and quantum well width is crucially important for understanding the optical properties; and, hence, the fabrication of efficient light-emitting devices. Our results showed that spinodal decomposition could occur in InGaN/GaN multiple-quantum wells with 20 % nominal indium content, grown with MOCVD. In such a structure, ordering, planar faults, clustering, and phase separation were simultaneously observed with high-resolution transmission electron microscopy, selected area diffraction, and X-ray diffraction. It seemed that the indium-rich precipitates with diameter ranging from 5 to 10 nm has preference for aggregation near V-shape defects.

Original languageEnglish
Pages (from-to)121-126
Number of pages6
JournalJournal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an
Volume9
Issue number2
StatePublished - May 2002

Keywords

  • Indium aggregation
  • InGaN/GaN quantum well structures
  • Phase separation

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