Compact and passive-alignment 4-channel x 2.5Gbps optical interconnect modules based on silicon optical benches with 45° micro-reflectors

Hsu Liang Hsiao, Hsiao Chin Lan, Chia Chi Chang, Chia Yu Lee, Siou Ping Chen, Chih Hung Hsu, Shuo Fu Chang, Yo Shen Lin, Feng Ming Kuo, Jin Wei Shi, Mount Learn Wu

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

Compact and passive-alignment 4-channel x 2.5-Gbps optical interconnect modules are developed based on the silicon optical benches (SiOBs) of 5 x 5 mm2. A silicon-based 45° micro-reflector and V-groove arrays are fabricated on the SiOB using anisotropic wet etching. Moreover, high-frequency transmission lines of 4 channel x 2.5 Gbps, and bonding pads with Au/Sn eutectic solder are also deposited on the SiOB. The vertical-cavity surface-emitting laser (VCSEL) array and photo-detector (PD) array are flip-chip assembled on the intended positions. The multi-mode fiber (MMF) ribbons are passively aligned and mounted onto the V-groove arrays. Without the assistance of additional optics, the coupling efficiencies of VCSEL-to-MMF in the transmitting part and MMF-to-PD in the receiving part can be as high as -5.65 and -1.98 dB, respectively, under an optical path of 180 μm. The 1-dB coupling tolerance of greater than ± 20 μm is achieved for both transmitting and receiving parts. Eye patterns of both parts are demonstrated using 15-bit PRBS at 2.5 Gbps.

Original languageEnglish
Pages (from-to)24250-24260
Number of pages11
JournalOptics Express
Volume17
Issue number26
DOIs
StatePublished - 21 Dec 2009

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