@inproceedings{4aad4dbc80d244c3820a9af9586990d6,
title = "Common-path laser encoder system for nanopositioning",
abstract = "In this paper a novel common-path laser encoder system for nanopositioning is proposed, that can effectively reduce the environmental disturbance at its lowest level. It has promising potential for nanometer resolution and large range applications. The experimental results of the proposed laser encoder match well with ones of HP5529A for large ranges. The tested results also show that it has the capability of nanometer scale measurement resolution.",
keywords = "Common-path, Grating, Interference, Laser encoder, Nanopositioning",
author = "Wu, {Chyan Chyi} and Hsu, {Cheng Chih} and Lee, {Ju Yi} and Cheng, {Chun Yao}",
year = "2011",
doi = "10.1117/12.892792",
language = "???core.languages.en_GB???",
isbn = "9780819487155",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V",
note = "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V ; Conference date: 24-08-2011 Through 25-08-2011",
}