Common-path laser encoder for nanopositioning in long travel range

Chyan Chyi Wu, Cheng Chih Hsu, Ju Yi Lee, Chun Yao Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

In this paper, a novel common-path diffractive laser encoder is proposed, that can reduce the environmental disturbance at its lowest level. It has promising potential for nanometer resolution and long travel range applications. The experimental results demonstrate the proposed laser encoder has the capability of nanometer scale measurement resolution. And the measurement results for millimeter travel range also match well with ones of the commercial laser interferometer.

Original languageEnglish
Title of host publicationSICE 2011 - SICE Annual Conference 2011, Final Program and Abstracts
PublisherSociety of Instrument and Control Engineers (SICE)
Pages817-820
Number of pages4
ISBN (Print)9784907764395
StatePublished - 2011
Event50th Annual Conference on Society of Instrument and Control Engineers, SICE 2011 - Tokyo, Japan
Duration: 13 Sep 201118 Sep 2011

Publication series

NameProceedings of the SICE Annual Conference

Conference

Conference50th Annual Conference on Society of Instrument and Control Engineers, SICE 2011
Country/TerritoryJapan
CityTokyo
Period13/09/1118/09/11

Keywords

  • Common-path
  • Laser encoder
  • Long travel range

Fingerprint

Dive into the research topics of 'Common-path laser encoder for nanopositioning in long travel range'. Together they form a unique fingerprint.

Cite this