Coefficient of thermal expansion and biaxial modulus of thin films on a thin substrate

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A modified Stoney's equation is provided to solve the coefficients of thermal expansion and biaxial modulus of the thin film when the thickness ratio (thin film thickness/substrate thickness) is larger than 1%.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2007
PublisherOptical Society of America (OSA)
ISBN (Print)1557528411, 9781557528414
DOIs
StatePublished - 2007
EventOptical Interference Coatings, OIC 2007 - Tucson, AZ, United States
Duration: 3 Jun 20073 Jun 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Interference Coatings, OIC 2007
Country/TerritoryUnited States
CityTucson, AZ
Period3/06/073/06/07

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