CMOS-compatible 6-inch wafer integration of photonic waveguides and uniformity analysis

Keyphrases

• CMOS Technology 100%
• Wafer 100%
• Photonic Waveguide 100%
• Uniformity Analysis 100%
• Waveguide Analysis 100%
• Photonic Devices 66%
• Waveguide Resonators 66%
• Groove Structure 66%
• Photonics 33%
• Long-term Stability 33%
• Process Integration 33%
• Low Loss 33%
• High Uniformity 33%
• I-line 33%
• Quality Factor (Q-factor) 33%
• Good Quality 33%
• Silicon Waveguide 33%
• Resonator Structure 33%
• Wafer Process 33%
• Stepper Lithography 33%

Material Science

• Waveguide 100%
• Resonator 50%
• Optical Device 50%
• Lithography 25%
• Silicon Nitride 25%