Chemical microsensors

Chung Chiun Liu, Peter J. Hesketh, G. W. Hunter

Research output: Contribution to journalReview articlepeer-review

18 Scopus citations


The silicon-based processing technique known as microelectromechanical systems (MEMS) and their use in fabrication of chemical sensing microsystem is discussed. The techniques enables the fabrication of new sensor structures and sensor arrays with high capabilities and limited size, weight and power consumption. The MEMS technology provides the advantage of producing microsize structures in identical, highly uniform and geometrically well-defined manner. It is suggested that successful MEMS technologies are expected to batch process many sensors with reproducible features and improved capabilities.

Original languageEnglish
Pages (from-to)22-27
Number of pages6
JournalElectrochemical Society Interface
Issue number2
StatePublished - Jun 2004


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