Characterization of PZT thin films by sol-gel method in application of resonant sensor

Keyphrases

• C-V Characterization 33%
• Current Density Analysis 33%
• DC Shift 33%
• Detection Circuit 33%
• Frequency Signal 33%
• Gravimetric Method 66%
• Leakage Current Density 33%
• Measuring Circuit 33%
• Microfabrication Techniques 33%
• Micrometer Scale 33%
• Optical Microscopy 33%
• PZT Sensors 100%
• PZT Thin Films 100%
• Resonance Measurement 33%
• Resonant Frequency 33%
• Resonant Sensor 100%
• Scanning Electron Microscopy 33%
• Sol-gel Method 100%
• Sol-gel PZT 33%

Engineering

• Frequency Signal 50%
• Microfabrication 50%
• Piezoelectric 50%
• Resonance Frequency 50%
• Resonant Sensor 100%
• Sol-Gel Process 100%
• Thin Films 100%

Material Science

• Density 50%
• Electronic Circuit 100%
• Microfabrication 50%
• Piezoelectricity 50%
• Scanning Electron Microscopy 50%
• Sol-Gel 100%
• Thin Films 100%