Characterization of field dependent aberrations in fizeau interferometer using double zernike polynomials

Hung Sheng Chang, Chao Wen Liang, Po Chih Lin, Ming Sen Tsao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Fizeau interferometer is widely used to test the surface deformation of the optical lens surface profile. However, in some measurement circumstances the common path condition of the Fizeau configuration does not hold. For example, the subaperture scanning interferometry of asphere or the non-null aspherical element testing has dense fringe spacing. Systematic aberrations of non-null testing are introduced into the measurement wavefront with the high wavefront slope of the returning beam. We propose to use a two-dimension scanning device to drive a test ball to different fields of the Fizeau interferometer for the the interference phase at each field. By least square fitting the measurement, we can get the double Zernike polynomial coefficients representing the field dependent aberrations in the interferometer system. According to the coefficients, the off-axis aberrations in the interferometer can be identified.

Original languageEnglish
Title of host publicationInterferometry XVII
Subtitle of host publicationTechniques and Analysis
EditorsKatherine Creath, Jan Burke, Joanna Schmit
PublisherSPIE
ISBN (Electronic)9781628412307
DOIs
StatePublished - 2014
EventInterferometry XVII: Techniques and Analysis - San Diego, United States
Duration: 17 Aug 201419 Aug 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9203
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceInterferometry XVII: Techniques and Analysis
Country/TerritoryUnited States
CitySan Diego
Period17/08/1419/08/14

Keywords

  • Double Zernike polynomial
  • Imaging aberrations of Fizeau interferometer
  • Retrace error

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