Characterization of Fe-Cr alloy metallic interconnects coated with LSMO using the aerosol deposition process

Jian Jia Huang, Yen Pei Fu, Jian Yih Wang, Yung Neng Cheng, Shyong Lee, Jin Cherng Hsu

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

A Fe-Cr alloy, used for metallic interconnects, was coated with a protective layer of lanthanum strontium manganite (LSMO) using the aerosol deposition method (AD). The effects of the LSMO protective layer, which was coated on the Fe-Cr interconnects using AD, on the area specific resistance (ASR) during high temperature oxidation and the Cr evaporation behaviors were systematically investigated in this paper. The microstructures, morphologies, and compositions of the oxidized scales that appeared on the LSMO-coated Fe-Cr alloy after annealing at 800 C for 750 h in air were examined using SEM equipped with EDS. The EPMA mapping of the LSMO-coated Fe-Cr interconnects undergoing long term, high-temperature oxidation was used to explain the formation layers of the oxidized scale, which consists of (Mn,Cr)3O4 and Cr2O3 layers. Moreover, the experimental results revealed that the AD process is a potential method for preparing denser protective layers with highly desirable electrical properties for metallic interconnects.

Original languageEnglish
Pages (from-to)63-68
Number of pages6
JournalMaterials Research Bulletin
Volume51
DOIs
StatePublished - Mar 2014

Keywords

  • A. Interfaces
  • C. Electron microscopy
  • D. Diffusion
  • D. Electrical properties

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