Cathodoluminescence evaluation of subsurface damage in GaN substrate after polishing

Keyphrases

• GaN Substrate 100%
• Cathodoluminescence 100%
• Subsurface Damage 100%
• Annealing 66%
• Surface Roughness 33%
• Gas Mixture 33%
• Atomic Force Microscopy 16%
• Optical Properties 16%
• Thermal Annealing 16%
• Scanning Electron Microscopy 16%
• Spectroscopy Imaging 16%
• Cathodoluminescence Spectroscopy 16%
• Polishing Process 16%
• Accelerating Voltage 16%
• Roughness Properties 16%
• Surface Scratch 16%
• Subsurface Damage Depth 16%

Material Science

• Cathodoluminescence 100%
• Surface (Surface Science) 100%
• Annealing 50%
• Surface Roughness 50%
• Gas Mixture 50%
• Scanning Electron Microscopy 25%
• Optical Property 25%
• Cathodoluminescence Spectroscopy 25%
• Surface Scratches 25%

Engineering

• Subsurface 100%
• Gas Mixture 28%
• Atomic Force Microscopy 14%