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Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane
Che Lung Hsu, Yung Chih Liu, Chih Ming Wang, Mount Learn Wu, Ya Lun Tsai, Yue Hong Chou, Chien Chieh Lee, Jenq Yang Chang
Research output: Contribution to journal › Article › peer-review
39
Scopus
citations