Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

Che Lung Hsu, Yung Chih Liu, Chih Ming Wang, Mount Learn Wu, Ya Lun Tsai, Yue Hong Chou, Chien Chieh Lee, Jenq Yang Chang

Research output: Contribution to journalArticlepeer-review

38 Scopus citations

Fingerprint

Dive into the research topics of 'Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane'. Together they form a unique fingerprint.

Physics & Astronomy