TY - JOUR
T1 - Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane
AU - Hsu, Che Lung
AU - Liu, Yung Chih
AU - Wang, Chih Ming
AU - Wu, Mount Learn
AU - Tsai, Ya Lun
AU - Chou, Yue Hong
AU - Lee, Chien Chieh
AU - Chang, Jenq Yang
N1 - Funding Information:
Manuscript received October 20, 2005; revised January 16, 2006. This work was supported by the Micro-Optoelectronical Laboratory (MOEL) Program for Promoting Academic Excellence of Universities under Grant 91-E-FA06-1-4. C.-L. Hsu, Y.-C. Liu, C.-M. Wang, M.-L. Wu, Y.-L. Tsai, Y.-H. Chou, and J.-Y. Chang are with the Institute of Optical Sciences, National Central University, Jhongli 32001, Taiwan, R.O.C. (e-mail: [email protected]). C.-C. Lee is with the Optical Science Center, National Central University, Jhongli 32001, Taiwan, R.O.C. Digital Object Identifier 10.1109/JLT.2006.871117
PY - 2006/4
Y1 - 2006/4
N2 - In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices,Δλ of the stopband at a transmission below 10% is 5.06 nm.
AB - In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices,Δλ of the stopband at a transmission below 10% is 5.06 nm.
KW - Bulk-micromachining
KW - Guided-mode resonance (GMR)
KW - SIN membrane
UR - http://www.scopus.com/inward/record.url?scp=33645831780&partnerID=8YFLogxK
U2 - 10.1109/JLT.2006.871117
DO - 10.1109/JLT.2006.871117
M3 - 期刊論文
AN - SCOPUS:33645831780
SN - 0733-8724
VL - 24
SP - 1922
EP - 1928
JO - Journal of Lightwave Technology
JF - Journal of Lightwave Technology
IS - 4
ER -