Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

Che Lung Hsu, Yung Chih Liu, Chih Ming Wang, Mount Learn Wu, Ya Lun Tsai, Yue Hong Chou, Chien Chieh Lee, Jenq Yang Chang

Research output: Contribution to journalArticlepeer-review

39 Scopus citations


In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices,Δλ of the stopband at a transmission below 10% is 5.06 nm.

Original languageEnglish
Pages (from-to)1922-1928
Number of pages7
JournalJournal of Lightwave Technology
Issue number4
StatePublished - Apr 2006


  • Bulk-micromachining
  • Guided-mode resonance (GMR)
  • SIN membrane


Dive into the research topics of 'Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane'. Together they form a unique fingerprint.

Cite this