@article{58e30e4d87844d01a2e30d727bfdb1dd,
title = "Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane",
abstract = "In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices,Δλ of the stopband at a transmission below 10% is 5.06 nm.",
keywords = "Bulk-micromachining, Guided-mode resonance (GMR), SIN membrane",
author = "Hsu, {Che Lung} and Liu, {Yung Chih} and Wang, {Chih Ming} and Wu, {Mount Learn} and Tsai, {Ya Lun} and Chou, {Yue Hong} and Lee, {Chien Chieh} and Chang, {Jenq Yang}",
note = "Funding Information: Manuscript received October 20, 2005; revised January 16, 2006. This work was supported by the Micro-Optoelectronical Laboratory (MOEL) Program for Promoting Academic Excellence of Universities under Grant 91-E-FA06-1-4. C.-L. Hsu, Y.-C. Liu, C.-M. Wang, M.-L. Wu, Y.-L. Tsai, Y.-H. Chou, and J.-Y. Chang are with the Institute of Optical Sciences, National Central University, Jhongli 32001, Taiwan, R.O.C. (e-mail: clxu@ios.ncu.edu.tw). C.-C. Lee is with the Optical Science Center, National Central University, Jhongli 32001, Taiwan, R.O.C. Digital Object Identifier 10.1109/JLT.2006.871117",
year = "2006",
month = apr,
doi = "10.1109/JLT.2006.871117",
language = "???core.languages.en_GB???",
volume = "24",
pages = "1922--1928",
journal = "Journal of Lightwave Technology",
issn = "0733-8724",
number = "4",
}