Broadband achromatic thermal metalens with a wide field of view based on wafer-level monolithic processes

Yen Chun Chen, Wei Lun Hsu, Qiu Chun Zeng, Chen Yi Yu, Pin Do Chen, Che Chin Chen, Yu Hsin Lin, Fong Zhi Chen, Chih Ming Wang

Research output: Contribution to journalArticlepeer-review

Abstract

We present a monolithic metalens free of chromatic aberration over the 8-12 μm wavelength range for thermal imaging. The metalens consists of nano-donut-pillars for dispersion engineering. The proposed metalens design is based on a telecentric optical system, which effectively eliminates off-focus distortion and aberration, enhancing overall imaging quality. Offering a 90° field of view, the metalens ensures uniform focal spot sizes within a 45° field angle across the working wavelength. This enables the capture of high-quality thermal images with sharp images and minimal distortion. With a diameter of 5.75 mm, the metalens is suitable for integration into commercial thermal imaging cameras. The nano-donut-pillar structure of the metalens allows for relatively straightforward mass production, involving i-line stepper lithography and silicon deep etching processes.

Original languageEnglish
Article number051702
JournalApplied Physics Letters
Volume125
Issue number5
DOIs
StatePublished - 29 Jul 2024

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