Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation

Youngki Choe; Shih Jui Chen; Eun Sok Kim

Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation

Youngki Choe, Shih Jui Chen, Eun Sok Kim

Department of Mechanical Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright

Original language	English
Pages	1764-1784
Number of pages	21
State	Published - 2010
Event	International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010 - Scottsdale and Fountain Hills, AZ, United States Duration: 8 Mar 2010 → 11 Mar 2010

Conference

Conference	International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010
Country/Territory	United States
City	Scottsdale and Fountain Hills, AZ
Period	8/03/10 → 11/03/10

Keywords

Mechanically polished
Mems microspeaker
Piezoelectric bimorph
Pzt
Pzt diaphragm
Uniform displacement

Cite this

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abstract = "This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright",

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Choe, Y, Chen, SJ & Kim, ES 2010, 'Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation', Paper presented at International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010, Scottsdale and Fountain Hills, AZ, United States, 8/03/10 - 11/03/10 pp. 1764-1784.

Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation. / Choe, Youngki; Chen, Shih Jui; Kim, Eun Sok.
2010. 1764-1784 Paper presented at International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010, Scottsdale and Fountain Hills, AZ, United States.

Research output: Contribution to conference › Paper › peer-review

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AU - Choe, Youngki

AU - Chen, Shih Jui

AU - Kim, Eun Sok

PY - 2010

Y1 - 2010

N2 - This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright

AB - This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright

KW - Mechanically polished

KW - Mems microspeaker

KW - Piezoelectric bimorph

KW - Pzt

KW - Pzt diaphragm

KW - Uniform displacement

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M3 - 會議論文

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EP - 1784

T2 - International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010

Y2 - 8 March 2010 through 11 March 2010

ER -

Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation

Abstract

Conference

Keywords

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