Applications of microfabrication techniques in electrochemical sensor development

Chung Chiun Liu

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


Electrochemical sensors have been used either as a whole or as an integral part of a chemical and biological sensing device. Microfabrication technology has been used in the development of electrochemical sensors. The recent advancement of micromachining techniques adds new impetus to electrochemical sensor development. Most noticable is the application of anisotropic chemical etching, plasma etching, sacrificial layer methods, and high aspect ratio X-ray lithography to enhance the opportunity to produce scientifically and commercially viable electrochemical sensors. Examples will be used to illustrate the potential of microfabrication and micromachining techniques in electrochemical sensor development.

Original languageEnglish
Pages (from-to)99-107
Number of pages9
JournalApplied Biochemistry and Biotechnology
Issue number1-2
StatePublished - Apr 1993


  • Microfabrication techniques
  • electrochemical sensor development


Dive into the research topics of 'Applications of microfabrication techniques in electrochemical sensor development'. Together they form a unique fingerprint.

Cite this