Abstract
This module combined the techniques of MEMS, near-field optics, fly head, and multiple beam. It organized the optical component and waveguide into a substrate. It integrated the multiple beam optical module for near-field high density recording, used the optics characteristic of the diffractive optical element, (DOE), generate multiple beams equally on the module, and reduce the spot size by using the near field optics. Simultaneously, quite a bit of information is recorded on the tracks of high density optical discs.
Original language | English |
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Pages (from-to) | 261-269 |
Number of pages | 9 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4904 |
DOIs | |
State | Published - 2002 |
Event | Optical Fiber and Planar Waveguide Technology II - Shanghai, China Duration: 16 Oct 2002 → 18 Oct 2002 |
Keywords
- MEMS
- Multibeam
- Near field
- Recording head
- Solid immersion lens