Application of planar waveguide for near-field recording with multibeam method

Chi Feng Chen, Jian Shian Lin, Hsi Fu Shih

Research output: Contribution to journalConference articlepeer-review


This module combined the techniques of MEMS, near-field optics, fly head, and multiple beam. It organized the optical component and waveguide into a substrate. It integrated the multiple beam optical module for near-field high density recording, used the optics characteristic of the diffractive optical element, (DOE), generate multiple beams equally on the module, and reduce the spot size by using the near field optics. Simultaneously, quite a bit of information is recorded on the tracks of high density optical discs.

Original languageEnglish
Pages (from-to)261-269
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
EventOptical Fiber and Planar Waveguide Technology II - Shanghai, China
Duration: 16 Oct 200218 Oct 2002


  • MEMS
  • Multibeam
  • Near field
  • Recording head
  • Solid immersion lens


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