APPLICATION OF MICROELECTRONIC FABRICATION TECHNIQUES TO ELECTROCHEMICAL SENSORS.

Chung Chiun Liu, Michael R. Neuman

Research output: Contribution to conferencePaperpeer-review

Abstract

Thin and thick film microelectronic technology has been applied to the design and fabrication of electrochemical sensors for various applications. Examples of some of these are presented, and the advantages of this technology to specific sensor applications are pointed out.

Original languageEnglish
Pages49bp
StatePublished - 1985

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