Angular-interrogation attenuated total reflection metrology system for plasmonic sensors

Jenq Nan Yih; Fan Ching Chien; Chun Yun Lin; Hon Fai Yau; Shean Jen Chen

doi:10.1364/AO.44.006155

Angular-interrogation attenuated total reflection metrology system for plasmonic sensors

Jenq Nan Yih, Fan Ching Chien, Chun Yun Lin, Hon Fai Yau, Shean Jen Chen

Department of Optics and Photonics

Research output: Contribution to journal › Review article › peer-review

31 Scopus citations

Abstract

We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupledwaveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10^-4 deg.

Original language	English
Pages (from-to)	6155-6162
Number of pages	8
Journal	Applied Optics
Volume	44
Issue number	29
DOIs	https://doi.org/10.1364/AO.44.006155
State	Published - 10 Oct 2005

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abstract = "We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupledwaveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10-4 deg.",

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AU - Yih, Jenq Nan

AU - Chien, Fan Ching

AU - Lin, Chun Yun

AU - Yau, Hon Fai

AU - Chen, Shean Jen

PY - 2005/10/10

Y1 - 2005/10/10

N2 - We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupledwaveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10-4 deg.

AB - We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupledwaveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10-4 deg.

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JO - Applied Optics

JF - Applied Optics

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Angular-interrogation attenuated total reflection metrology system for plasmonic sensors

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