Analysis of nano-channel array fabricated by multi-step anodic aluminum oxide method

Chun Ko Chen, Sheng Hui Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Nano-channel array has been fabricated by anodic aluminum oxide(AAO) method with 100 V, 120 V, and 140 V bias voltages and 1, 5-step AAO process in this study. We discussed the growing mechanism of nano-channels and effect of multi-step in AAO process. At least, the distribution and circularity of nano-channel array under different bias voltage were analyzed.

Original languageEnglish
Title of host publication4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
StatePublished - 2011
Event4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
Duration: 21 Jun 201124 Jun 2011

Publication series

NameProceedings - International NanoElectronics Conference, INEC
ISSN (Print)2159-3523

Conference

Conference4th IEEE International Nanoelectronics Conference, INEC 2011
Country/TerritoryTaiwan
CityTao-Yuan
Period21/06/1124/06/11

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