Nano-channel array has been fabricated by anodic aluminum oxide(AAO) method with 100 V, 120 V, and 140 V bias voltages and 1, 5-step AAO process in this study. We discussed the growing mechanism of nano-channels and effect of multi-step in AAO process. At least, the distribution and circularity of nano-channel array under different bias voltage were analyzed.
|Title of host publication||4th IEEE International NanoElectronics Conference, INEC 2011|
|State||Published - 2011|
|Event||4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan|
Duration: 21 Jun 2011 → 24 Jun 2011
|Name||Proceedings - International NanoElectronics Conference, INEC|
|Conference||4th IEEE International Nanoelectronics Conference, INEC 2011|
|Period||21/06/11 → 24/06/11|