@inproceedings{b05ea1cf24f6417d92dfa69ef02680c1,
title = "Analysis of nano-channel array fabricated by multi-step anodic aluminum oxide method",
abstract = "Nano-channel array has been fabricated by anodic aluminum oxide(AAO) method with 100 V, 120 V, and 140 V bias voltages and 1, 5-step AAO process in this study. We discussed the growing mechanism of nano-channels and effect of multi-step in AAO process. At least, the distribution and circularity of nano-channel array under different bias voltage were analyzed.",
author = "Chen, {Chun Ko} and Chen, {Sheng Hui}",
year = "2011",
doi = "10.1109/INEC.2011.5991761",
language = "???core.languages.en_GB???",
isbn = "9781457703799",
series = "Proceedings - International NanoElectronics Conference, INEC",
booktitle = "4th IEEE International NanoElectronics Conference, INEC 2011",
note = "4th IEEE International Nanoelectronics Conference, INEC 2011 ; Conference date: 21-06-2011 Through 24-06-2011",
}