Analysis of arrayed nanocapacitor formed on nanorods by flow-rate interruption atomic layer deposition

Bo Cheng Lin, Ching Shun Ku, Hsin Yi Lee, Subhendu Chakroborty, Albert T. Wu

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint

Dive into the research topics of 'Analysis of arrayed nanocapacitor formed on nanorods by flow-rate interruption atomic layer deposition'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Chemical Engineering