For meeting the requirements of the high-precision telescopes, the design of collimator is essential. The diameter of the collimator should be larger than that of the target for the using of alignment. Special supporting structures are demanded to reduce the deformation of gravity and to control the surface deformation induced by the mounting force when inspecting large-aperture primary mirrors. By using finite element analysis, a ZERODUR® mirror of a diameter of 620 mm will be analyzed to obtain the deformation induced by the supporting structures. Zernike polynomials will also be adopted to fit the optical surface and separate corresponding aberrations. Through the studies under different boundary conditions and supporting positions of the inner ring, it is concluded that the optical performance will be excellent under a strong enough supporter.