An electrostatically activated resonant micropump-mixer

Chia Wen Tsao, Kamran Mohseni

Research output: Contribution to conferencePaperpeer-review

1 Scopus citations


An active mixing and pumping strategy is proposed to enhance mixing of two fluids through vortex formation and accumulation. A resonant micropump-mixer is designed and fabricated, where an electrostatically activated plate is placed at or in close vicinity of the interface between the two incoming streams at the junction of a Y- or T-shaped microchannel. Mixing is enhanced by increased interface area between the two fluids during the vortex formation at the tip of the resonant plate. Several packaging techniques are employed so that the two initially segregated streams flow underneath and above the resonant plate. Fabrication of the micropump-mixer is achieved in two steps. Commercial PolyMUMPs process is initially used to fabricate a resonant plate. The resonant plate is then flip-chip bonded into a prefabricated microchannel. The Laser Induced Fluorescence (LIF) technique is used for flow visualization and characterization, where effective mixing and pumping capabilities of the micropump-mixer are demonstrated.

Original languageEnglish
Number of pages12
StatePublished - 2005
Event43rd AIAA Aerospace Sciences Meeting and Exhibit - Reno, NV, United States
Duration: 10 Jan 200513 Jan 2005


Conference43rd AIAA Aerospace Sciences Meeting and Exhibit
Country/TerritoryUnited States
CityReno, NV


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