Ammonium hydroxide effect on low-temperature wafer bonding energy enhancement

Y. L. Chao, Q. Y. Tong, T. H. Lee, M. Reiche, R. Scholz, J. C.S. Woo, U. Gösele

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Fingerprint

Dive into the research topics of 'Ammonium hydroxide effect on low-temperature wafer bonding energy enhancement'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Chemical Engineering