Keyphrases
Ammonium Hydroxide
100%
Bond Energy
100%
Low Temperature Wafer Bonding
100%
Oxide Bonding
100%
Energy Enhancement
100%
Surface Energy
75%
Silicon Oxide
50%
Annealing
25%
Material System
25%
Low Temperature
25%
Wafer
25%
Ammonia
25%
High Bonding Strength
25%
Bridge Bonds
25%
Siloxane
25%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
25%
Silicon-germanium
25%
Pre-bond
25%
Polymerization Reaction
25%
Thermal Silicon Dioxide
25%
Germanium Surface
25%
Engineering
Energy Engineering
100%
Low-Temperature
100%
Wafer Bonding
100%
Silicon Oxide
100%
Interfacial Energy
100%
Material System
33%
Chemical Vapor Deposition
33%
Vapor Deposition
33%
Polymerization
33%
Bridging
33%
Bonding Strength
33%
Material Science
Oxide Compound
100%
Silicon
75%
Surface Energy
75%
Germanium
50%
Annealing
25%
Polymerization
25%
Plasma-Enhanced Chemical Vapor Deposition
25%
Surface (Surface Science)
25%
Chemical Engineering
Silicon Oxide
100%
Ammonium Hydroxide
100%
Plasma Enhanced Chemical Vapor Deposition
33%
Polymerization
33%