Air-core hollow optical waveguides with omnidirectional reflectors

Shih Shou Lo, Chii Chang Chen

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We have designed and fabricated a hollow optical waveguide with omnidirectional reflectors (ODRs) on a0 silicon substrate. The pattern is defined by photolithography on a (100) silicon wafer. The groove is etched by inductive coupled plasma. Plasma-enhanced chemical vapor deposition technology is used to deposit six-pair Si/SiO2 (0.111/0.258 μm) multilayer stacks on the sample. Finally, the top of the sample is covered with an identical ODR. Hence, the light is confined in a hollow waveguide.

Original languageEnglish
Article number044601
JournalOptical Engineering
Volume45
Issue number4
DOIs
StatePublished - Apr 2006

Keywords

  • Hollow waveguide
  • Omnidirectional reflector

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