Air-core hollow optical waveguides with omnidirectional reflectors

Shih Shou Lo; Chii Chang Chen

doi:10.1117/1.2189289

Air-core hollow optical waveguides with omnidirectional reflectors

Shih Shou Lo, Chii Chang Chen

Department of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We have designed and fabricated a hollow optical waveguide with omnidirectional reflectors (ODRs) on a0 silicon substrate. The pattern is defined by photolithography on a (100) silicon wafer. The groove is etched by inductive coupled plasma. Plasma-enhanced chemical vapor deposition technology is used to deposit six-pair Si/SiO₂ (0.111/0.258 μm) multilayer stacks on the sample. Finally, the top of the sample is covered with an identical ODR. Hence, the light is confined in a hollow waveguide.

Original language	English
Article number	044601
Journal	Optical Engineering
Volume	45
Issue number	4
DOIs	https://doi.org/10.1117/1.2189289
State	Published - Apr 2006

Keywords

Hollow waveguide
Omnidirectional reflector

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10.1117/1.2189289

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AB - We have designed and fabricated a hollow optical waveguide with omnidirectional reflectors (ODRs) on a0 silicon substrate. The pattern is defined by photolithography on a (100) silicon wafer. The groove is etched by inductive coupled plasma. Plasma-enhanced chemical vapor deposition technology is used to deposit six-pair Si/SiO2 (0.111/0.258 μm) multilayer stacks on the sample. Finally, the top of the sample is covered with an identical ODR. Hence, the light is confined in a hollow waveguide.

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Air-core hollow optical waveguides with omnidirectional reflectors

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Keywords

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