Abstract
Atomic force microscopy (AFM) is a powerful measurement tool, widely used in microfabricated structure inspection. However, since it is typical that the fixed tilting angle of a probe is employed in traditional AFM, the corner and sidewall image of the scanned sample would be distorted. To overcome the problem, a so-called adaptive tilting angle algorithm (ATAA) applied to a self-designed dual-probe AFM system is presented to achieve on-line sidewall estimation during scanning of general samples. Through the use of the proposed ATAA, the tilting angles of dual probes for each scan line can be self-adjusted to the optimal ones. Overall, a probe tilt mechanism is designed, which allows the AFM system to change the tilting angles of the probes during the scanning process such that the dual-probe structure AFM can acquire a complete high precision image with just a single scan. The experimental results show the performance of sidewall measurement and the high-precision image obtained by the proposed method.
Original language | English |
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Pages (from-to) | 1339-1351 |
Number of pages | 13 |
Journal | Asian Journal of Control |
Volume | 20 |
Issue number | 4 |
DOIs | |
State | Published - Jul 2018 |
Keywords
- Atomic force microscopy (AFM)
- adaptive tilting angle
- dual-probe AFM
- high-precision scanning
- probe-tilt mechanism
- sidewall estimation