Adaptive tilting angles to achieve high-precision scanning of a dual probes AFM

Jim Wei Wu, Yu Ting Lo, Wei Chih Liu, Da Wei Liu, Kuang Yao Chang, Li Chen Fu

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Atomic force microscopy (AFM) is a powerful measurement tool, widely used in microfabricated structure inspection. However, since it is typical that the fixed tilting angle of a probe is employed in traditional AFM, the corner and sidewall image of the scanned sample would be distorted. To overcome the problem, a so-called adaptive tilting angle algorithm (ATAA) applied to a self-designed dual-probe AFM system is presented to achieve on-line sidewall estimation during scanning of general samples. Through the use of the proposed ATAA, the tilting angles of dual probes for each scan line can be self-adjusted to the optimal ones. Overall, a probe tilt mechanism is designed, which allows the AFM system to change the tilting angles of the probes during the scanning process such that the dual-probe structure AFM can acquire a complete high precision image with just a single scan. The experimental results show the performance of sidewall measurement and the high-precision image obtained by the proposed method.

Original languageEnglish
Pages (from-to)1339-1351
Number of pages13
JournalAsian Journal of Control
Volume20
Issue number4
DOIs
StatePublished - Jul 2018

Keywords

  • Atomic force microscopy (AFM)
  • adaptive tilting angle
  • dual-probe AFM
  • high-precision scanning
  • probe-tilt mechanism
  • sidewall estimation

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