Adaptive tilting angles for a dual-probe AFM system to increase image accuracy

Yu Ting Lo, Jim Wei Wu, Wei Chih Liu, Da Wei Liu, Kuang Yao Chang, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

While the feature size of micro-fabricated structures is continuously diminishing, the issue of high accuracy measurement becomes increasingly significant. In recent years, Atomic Force Microscopy (AFM) has become a powerful measurement tool which has been widely used in micro- and nano-fabricated structure inspection. However, owing to the fixed tilting angle of the scanning probe in traditional AFM, there generally exists a distorted scanning result at the corner and sidewall of the scanned sample. To mitigate the mentioned problem, this paper presents a self-designed dual-probe AFM system with an on-line adaptive tilting angle algorithm which can estimate the most effective tilting angle for each scanning probe. Above all, a novel probe-tilting mechanism is designed to change the tilting angle after one-line scanning process is accomplished. As a result, a complete and high-precision scanning image can be obtained in a single scan through such dual-probe structure.

Original languageEnglish
Title of host publication2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1318-1323
Number of pages6
ISBN (Electronic)9781509020652
DOIs
StatePublished - 26 Sep 2016
Event2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016 - Banff, Canada
Duration: 12 Jul 201615 Jul 2016

Publication series

NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Volume2016-September

Conference

Conference2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016
Country/TerritoryCanada
CityBanff
Period12/07/1615/07/16

Keywords

  • adaptive tilting angle
  • Atomic force microscopy (AFM)
  • dual-probe AFM
  • high-precision scanning

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