@inproceedings{b7ecaff3da0c435ea48b79b371bef090,
title = "Adaptive tilting angles for a dual-probe AFM system to increase image accuracy",
abstract = "While the feature size of micro-fabricated structures is continuously diminishing, the issue of high accuracy measurement becomes increasingly significant. In recent years, Atomic Force Microscopy (AFM) has become a powerful measurement tool which has been widely used in micro- and nano-fabricated structure inspection. However, owing to the fixed tilting angle of the scanning probe in traditional AFM, there generally exists a distorted scanning result at the corner and sidewall of the scanned sample. To mitigate the mentioned problem, this paper presents a self-designed dual-probe AFM system with an on-line adaptive tilting angle algorithm which can estimate the most effective tilting angle for each scanning probe. Above all, a novel probe-tilting mechanism is designed to change the tilting angle after one-line scanning process is accomplished. As a result, a complete and high-precision scanning image can be obtained in a single scan through such dual-probe structure.",
keywords = "Atomic force microscopy (AFM), adaptive tilting angle, dual-probe AFM, high-precision scanning",
author = "Lo, {Yu Ting} and Wu, {Jim Wei} and Liu, {Wei Chih} and Liu, {Da Wei} and Chang, {Kuang Yao} and Fu, {Li Chen}",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016 ; Conference date: 12-07-2016 Through 15-07-2016",
year = "2016",
month = sep,
day = "26",
doi = "10.1109/AIM.2016.7576952",
language = "???core.languages.en_GB???",
series = "IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1318--1323",
booktitle = "2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016",
}