Acoustic transducers built on edge-released MEMS structures

Shih Jui Chen, Youngki Choe, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents acoustic transducers built on edge-released MEMS structures, i.e., cantilever diaphragm and spiral-beam-supported diaphragm that are designed to release residual stress and also to avoid in-plane tension when bent. Sputter-deposited ZnO on the diaphragms is used as the piezoelectric thin film to sense and generate acoustic pressure. Typical diameter and thickness of the edge-released diaphragm are 1 mm and 1.6 µm, respectively. The maximum strain on the spiral-beam-supported diaphragm is about an order of magnitude larger than that of a cantilever diaphragm transducer for a given pressure level and diaphragm size. The spiral offers a higher sensitivity at the cost of a lower usable bandwidth and less tolerance on the fabrication process variation.

Original languageEnglish
Title of host publication2010 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsDavid J. Monk, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages234-237
Number of pages4
ISBN (Electronic)0964002485, 9780964002487
DOIs
StatePublished - 2010
Event2010 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: 6 Jun 201010 Jun 2010

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/TerritoryUnited States
CityHilton Head Island
Period6/06/1010/06/10

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