Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications

Ning Hsiu Yuan, Chih Chia Chen, Yiin Kuen Fuh, Tomi T. Li

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds