Abatement of perfluorocarbons with combined plasma catalysis in atmospheric-pressure environment

Moo Been Chang, How Ming Lee

Research output: Contribution to journalArticlepeer-review

75 Scopus citations


Perfluorocarbons (PFCs) are widely used in semiconductor industry. However, they intensely absorb infrared radiation and consequently aggravate the greenhouse effect. A combined plasma catalysis (CPC) technology is developed to destroy PFCs. For practical purpose the CPC is designed to function at room temperature and atmospheric pressure. In addition, this study compares three kinds of operations, i.e. catalysis, plasmas and CPC. Results indicate that CPC achieves the highest PFC destruction efficiency. Complete destructions are achieved for SF6 and NF3. Removal efficiencies for CF 4 and C2F6 are 66 and 83%, respectively. The products formed in CPC process for CF4 and C2F 6 are mainly CO2 and a little CO. In contrast, the products formed in plasma process include CO2, CO, COF2, and CF4. In brief, this study demonstrates that CPC is of a higher efficiency and less-toxic products for PFC removal compared with plasma technology at the given conditions.

Original languageEnglish
Pages (from-to)109-115
Number of pages7
JournalCatalysis Today
Issue number1-2
StatePublished - 29 Feb 2004


  • Air pollution control technology
  • Combined plasma catalysis (CPC)
  • Global warming
  • Perfluorocarbons (PFCs)


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