Abstract
A field emission cathode composed of multiple tungsten pins providing uniform discharge and a Wehnelt cylinder performing focusing and triggering are the new features of this pulsed electron beam source. We have successfully annealed ion-implanted CdTe, Culn S2 and silicon from their damage states. The activation of p-type CdTe dopants can reach as high as 3 × 1018 cm-3.
Original language | English |
---|---|
Pages (from-to) | 275-278 |
Number of pages | 4 |
Journal | Vacuum |
Volume | 36 |
Issue number | 5 |
DOIs | |
State | Published - May 1986 |