A photonic crystal ring resonator formed by SOI nano-rods

Wei Yu Chiu, Tai Wei Huang, Yen Hsiang Wu, Yi Jen Chan, Chia Hung Hou, Hung Ta Chien, Chii Chang Chen

Research output: Contribution to journalArticlepeer-review

72 Scopus citations

Abstract

The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55μm. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31μm/1.55μm wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.

Original languageEnglish
Pages (from-to)15500-15506
Number of pages7
JournalOptics Express
Volume15
Issue number23
DOIs
StatePublished - 12 Nov 2007

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