A photonic crystal ring resonator formed by SOI nano-rods

Wei Yu Chiu; Tai Wei Huang; Yen Hsiang Wu; Yi Jen Chan; Chia Hung Hou; Hung Ta Chien; Chii Chang Chen

doi:10.1364/OE.15.015500

A photonic crystal ring resonator formed by SOI nano-rods

Wei Yu Chiu, Tai Wei Huang, Yen Hsiang Wu, Yi Jen Chan, Chia Hung Hou, Hung Ta Chien, Chii Chang Chen

Department of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

74 Scopus citations

Abstract

The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55μm. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31μm/1.55μm wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.

Original language	English
Pages (from-to)	15500-15506
Number of pages	7
Journal	Optics Express
Volume	15
Issue number	23
DOIs	https://doi.org/10.1364/OE.15.015500
State	Published - 12 Nov 2007

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title = "A photonic crystal ring resonator formed by SOI nano-rods",

abstract = "The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55μm. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31μm/1.55μm wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.",

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T1 - A photonic crystal ring resonator formed by SOI nano-rods

AU - Chiu, Wei Yu

AU - Huang, Tai Wei

AU - Wu, Yen Hsiang

AU - Chan, Yi Jen

AU - Hou, Chia Hung

AU - Chien, Hung Ta

AU - Chen, Chii Chang

PY - 2007/11/12

Y1 - 2007/11/12

N2 - The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55μm. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31μm/1.55μm wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.

AB - The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55μm. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31μm/1.55μm wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.

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M3 - 期刊論文

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SN - 1094-4087

VL - 15

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EP - 15506

JO - Optics Express

JF - Optics Express

IS - 23

ER -

A photonic crystal ring resonator formed by SOI nano-rods

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