A patterned dielectric support process for high performance passive fabrication

Keyphrases

• High Performance 100%
• Coplanar Waveguide 100%
• Support Processes 100%
• Dielectric Supports 100%
• Silicon Substrate 50%
• Insertion Loss 50%
• Oxide Nitride 50%
• Resistivity 50%
• Analytical Model 50%
• Micromachining Technique 50%
• Substrate Loss 50%

Engineering

• Dielectrics 100%
• Waveguide 100%
• Experimental Result 50%
• Silicon Substrate 50%
• Insertion Loss 50%
• Nitride 50%
• Analytical Model 50%
• Micro Machining 50%

Material Science

• Waveguide 100%
• Dielectric Material 100%
• Oxide Compound 50%
• Silicon 50%
• Nitride Compound 50%
• Electrical Resistivity 50%
• Micromachining 50%