A novel Si-based stacked free space pick-up head and holographic optical element

Chien Chieh Lee, Jenq Yang Chang, Yu Cheng Chang, Guo Chung Chi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We propose an optical pick-tip head system, which can be used in optical MEMS technology, has been designed on stacked Si substrates. Transmission holographic grating was fabricated and studied the diffraction effect of the holographic optical element.

Original languageEnglish
Title of host publicationCLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publicationPhotonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages568
Number of pages1
ISBN (Electronic)0780377664
DOIs
StatePublished - 2003
Event5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
Duration: 15 Dec 200319 Dec 2003

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume2

Conference

Conference5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/TerritoryTaiwan
CityTaipei
Period15/12/0319/12/03

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