A Machine Learning Study to Obtain an Optimal Processing Pulsed Frequency on Reactive Pulsed DC Sputtering of Aluminum Nitride Films

Xue Li Tseng, Yu Shin Chen, Hsuan Fan Chen, Hsiao Han Lo, Peter J. Wang, Yu Min Dai, Yiin Kuen Fuh, Ting-Tung Li

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Keyphrases

Chemical Engineering

Material Science