@inproceedings{54dfc84b06c04c57a2bbab2094c575fb,
title = "A Machine Learning Study to Obtain an Optimal Processing Pulsed Frequency on Reactive Pulsed DC Sputtering of Aluminum Nitride Films",
abstract = "The goal of this study was to investigate how changing the pulsed frequency affects the deposition process and correlates with AlN film properties. The resulting films were then characterized in terms of their crystallinity, microstructure, and surface roughness to identify any correlations with the pulsed frequency. This approach was used to determine the optimal pulsed conditions for film deposition. Each dataset spans the wavelength range of 190nm to 850nm, comprising 1,900 features. Following data collection, we employed traditional ensemble learning methods (Random Forest), tree-based gradient boosting (Categorical Boosting), and the improved gradient-boosted algorithm (Histogram Gradient Boosting), for predicting the quality of thin films. This analysis aimed to clarify which method excels in handling semiconductor process OES data to obtain an optimal processing pulsed frequency on reactive pulsed DC sputtering of aluminum nitride films.",
keywords = "aluminum nitride (AlN), Categorical Boosting (CatBoost), Histogram-Based Gradient Boosting (HGB), machine learning, optical emission spectroscopy (OES), pulsed frequency, Random Forest, Reactive pulsed DC magnetron sputtering",
author = "Tseng, {Xue Li} and Chen, {Yu Shin} and Chen, {Hsuan Fan} and Lo, {Hsiao Han} and Wang, {Peter J.} and Dai, {Yu Min} and Fuh, {Yiin Kuen} and Ting-Tung Li",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 Conference of Science and Technology for Integrated Circuits, CSTIC 2024 ; Conference date: 17-03-2024 Through 18-03-2024",
year = "2024",
doi = "10.1109/CSTIC61820.2024.10532082",
language = "???core.languages.en_GB???",
series = "2024 Conference of Science and Technology for Integrated Circuits, CSTIC 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Cor Claeys and Beichao Zhang and Bin Yu and Ru Huang and Xiaowei Li and Liang, {Steve X.} and Jianshi Tang and Hsiang-Lan Lung and Linyong Pang and Weikang Qian and Xinping Qu and Xiaoping Shi and Ying Zhang",
booktitle = "2024 Conference of Science and Technology for Integrated Circuits, CSTIC 2024",
}