A linearity improvement technique for thin-film barium strontium titanate capacitors

Jia Shiang Fu, Xinen Alfred Zhu, Ding Yuan Chen, Jamie D. Phillips, Amir Mortazawi

Research output: Contribution to journalConference articlepeer-review

23 Scopus citations

Abstract

A device architecture is proposed to improve the linearity of barium strontium titanate (BST) capacitors while maintaining the tunability and the quality factor. Thin-film parallel plate capacitors are fabricated utilizing the proposed architecture. The measurement results successfully demonstrate the effectiveness of this approach. Up to 14 dB of improvement on IIP3 is observed.

Original languageEnglish
Article number4014960
Pages (from-to)560-563
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
DOIs
StatePublished - 2006
Event2006 IEEE MTT-S International Microwave Symposium Digest - San Francisco, CA, United States
Duration: 11 Jun 200616 Jun 2006

Keywords

  • Barium strontium titanate (BST)
  • Ferroelectric
  • Intermodulation distortion
  • Linearity
  • Tunable capacitor

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