A hybrid inorganic-organic barrier film deposited by magnetron sputtering

Cheng Chung Lee, Meng Chi Li, Shih Fang Liao, Chin Lun Wei, Sheng Chieh Huang, Chien Cheng Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


A magnetron sputtering system with plasma polymerized organic monomer was developed. The barrier films, the best WVTR value of 7.6×10-2 g/m2/day, was deposited by magnetron sputtering coupled with HMDSO/O2 plasma polymerization.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2013
StatePublished - 2013
EventOptical Interference Coatings, OIC 2013 - Whistler, Canada
Duration: 16 Jun 201321 Jun 2013

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceOptical Interference Coatings, OIC 2013


Dive into the research topics of 'A hybrid inorganic-organic barrier film deposited by magnetron sputtering'. Together they form a unique fingerprint.

Cite this