@inproceedings{b0677f789d2c450685e1728cd1ee8996,
title = "A hybrid inorganic-organic barrier film deposited by magnetron sputtering",
abstract = "A magnetron sputtering system with plasma polymerized organic monomer was developed. The barrier films, the best WVTR value of 7.6×10-2 g/m2/day, was deposited by magnetron sputtering coupled with HMDSO/O2 plasma polymerization.",
author = "Lee, {Cheng Chung} and Li, {Meng Chi} and Liao, {Shih Fang} and Wei, {Chin Lun} and Huang, {Sheng Chieh} and Kuo, {Chien Cheng}",
year = "2013",
language = "???core.languages.en_GB???",
isbn = "9781557529701",
series = "Optics InfoBase Conference Papers",
booktitle = "Optical Interference Coatings, OIC 2013",
note = "Optical Interference Coatings, OIC 2013 ; Conference date: 16-06-2013 Through 21-06-2013",
}