A dual probes AFM system with effective tilting angles to achieve high-precision scanning

Yi Ting Lin, Yu Ting Lo, Jim Wei Wu, Wei Chih Liu, Li Chen Fu

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations

Abstract

With the constant improvement of micro-fabrication techniques, the measurement of feature size of micro-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument which has been widely used in micro-fabricated structures measurement recently. However, due to the monotonic tilting angle of the probe in traditional AFM system, the scanning results of sample with high steep wall feature usually have distortion phenomenon at the corner part of the sample. To solve this problem, a novel dual probe AFM system is proposed in this paper. A system structure with high flexibility is used in this work to create different tilting angle of each probe. With the tilting angle deciding method developed in this paper, we can estimate the effective tilting angles for scanning under different scenarios. In addition, a useful merging method is also designed in this work, which can stich result from different scanning unit together and produce high-precision scanning results. Experimental results are shown to validate the outstanding capability of the proposed system and methods.

Original languageEnglish
Article number7040457
Pages (from-to)6801-6806
Number of pages6
JournalProceedings of the IEEE Conference on Decision and Control
Volume2015-February
Issue numberFebruary
DOIs
StatePublished - 2014
Event2014 53rd IEEE Annual Conference on Decision and Control, CDC 2014 - Los Angeles, United States
Duration: 15 Dec 201417 Dec 2014

Keywords

  • Atomic force microscopy (AFM)
  • Dual-probe AFM
  • High-precision scanning
  • Merging method
  • Tilting angle

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