A dual probes AFM system with effective tilting angles to achieve high-precision scanning

Yi Ting Lin; Yu Ting Lo; Jim Wei Wu; Wei Chih Liu; Li Chen Fu

doi:10.1109/CDC.2014.7040457

A dual probes AFM system with effective tilting angles to achieve high-precision scanning

Yi Ting Lin, Yu Ting Lo, Jim Wei Wu, Wei Chih Liu, Li Chen Fu

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

With the constant improvement of micro-fabrication techniques, the measurement of feature size of micro-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument which has been widely used in micro-fabricated structures measurement recently. However, due to the monotonic tilting angle of the probe in traditional AFM system, the scanning results of sample with high steep wall feature usually have distortion phenomenon at the corner part of the sample. To solve this problem, a novel dual probe AFM system is proposed in this paper. A system structure with high flexibility is used in this work to create different tilting angle of each probe. With the tilting angle deciding method developed in this paper, we can estimate the effective tilting angles for scanning under different scenarios. In addition, a useful merging method is also designed in this work, which can stich result from different scanning unit together and produce high-precision scanning results. Experimental results are shown to validate the outstanding capability of the proposed system and methods.

Original language	English
Title of host publication	53rd IEEE Conference on Decision and Control,CDC 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	6801-6806
Number of pages	6
Edition	February
ISBN (Electronic)	9781479977468
DOIs	https://doi.org/10.1109/CDC.2014.7040457
State	Published - 2014
Event	2014 53rd IEEE Annual Conference on Decision and Control, CDC 2014 - Los Angeles, United States Duration: 15 Dec 2014 → 17 Dec 2014

Publication series

Name	Proceedings of the IEEE Conference on Decision and Control
Number	February
Volume	2015-February
ISSN (Print)	0743-1546
ISSN (Electronic)	2576-2370

Conference

Conference	2014 53rd IEEE Annual Conference on Decision and Control, CDC 2014
Country/Territory	United States
City	Los Angeles
Period	15/12/14 → 17/12/14

Keywords

Atomic force microscopy (AFM)
Dual-probe AFM
High-precision scanning
Merging method
Tilting angle

Access to Document

10.1109/CDC.2014.7040457

Cite this

Lin, Y. T., Lo, Y. T., Wu, J. W., Liu, W. C., & Fu, L. C. (2014). A dual probes AFM system with effective tilting angles to achieve high-precision scanning. In 53rd IEEE Conference on Decision and Control,CDC 2014 (February ed., pp. 6801-6806). Article 7040457 (Proceedings of the IEEE Conference on Decision and Control; Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CDC.2014.7040457

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title = "A dual probes AFM system with effective tilting angles to achieve high-precision scanning",

abstract = "With the constant improvement of micro-fabrication techniques, the measurement of feature size of micro-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument which has been widely used in micro-fabricated structures measurement recently. However, due to the monotonic tilting angle of the probe in traditional AFM system, the scanning results of sample with high steep wall feature usually have distortion phenomenon at the corner part of the sample. To solve this problem, a novel dual probe AFM system is proposed in this paper. A system structure with high flexibility is used in this work to create different tilting angle of each probe. With the tilting angle deciding method developed in this paper, we can estimate the effective tilting angles for scanning under different scenarios. In addition, a useful merging method is also designed in this work, which can stich result from different scanning unit together and produce high-precision scanning results. Experimental results are shown to validate the outstanding capability of the proposed system and methods.",

keywords = "Atomic force microscopy (AFM), Dual-probe AFM, High-precision scanning, Merging method, Tilting angle",

author = "Lin, {Yi Ting} and Lo, {Yu Ting} and Wu, {Jim Wei} and Liu, {Wei Chih} and Fu, {Li Chen}",

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Lin, YT, Lo, YT, Wu, JW, Liu, WC & Fu, LC 2014, A dual probes AFM system with effective tilting angles to achieve high-precision scanning. in 53rd IEEE Conference on Decision and Control,CDC 2014. February edn, 7040457, Proceedings of the IEEE Conference on Decision and Control, no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 6801-6806, 2014 53rd IEEE Annual Conference on Decision and Control, CDC 2014, Los Angeles, United States, 15/12/14. https://doi.org/10.1109/CDC.2014.7040457

A dual probes AFM system with effective tilting angles to achieve high-precision scanning. / Lin, Yi Ting; Lo, Yu Ting; Wu, Jim Wei et al.
53rd IEEE Conference on Decision and Control,CDC 2014. February. ed. Institute of Electrical and Electronics Engineers Inc., 2014. p. 6801-6806 7040457 (Proceedings of the IEEE Conference on Decision and Control; Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - A dual probes AFM system with effective tilting angles to achieve high-precision scanning

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AU - Lo, Yu Ting

AU - Wu, Jim Wei

AU - Liu, Wei Chih

AU - Fu, Li Chen

PY - 2014

Y1 - 2014

N2 - With the constant improvement of micro-fabrication techniques, the measurement of feature size of micro-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument which has been widely used in micro-fabricated structures measurement recently. However, due to the monotonic tilting angle of the probe in traditional AFM system, the scanning results of sample with high steep wall feature usually have distortion phenomenon at the corner part of the sample. To solve this problem, a novel dual probe AFM system is proposed in this paper. A system structure with high flexibility is used in this work to create different tilting angle of each probe. With the tilting angle deciding method developed in this paper, we can estimate the effective tilting angles for scanning under different scenarios. In addition, a useful merging method is also designed in this work, which can stich result from different scanning unit together and produce high-precision scanning results. Experimental results are shown to validate the outstanding capability of the proposed system and methods.

AB - With the constant improvement of micro-fabrication techniques, the measurement of feature size of micro-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument which has been widely used in micro-fabricated structures measurement recently. However, due to the monotonic tilting angle of the probe in traditional AFM system, the scanning results of sample with high steep wall feature usually have distortion phenomenon at the corner part of the sample. To solve this problem, a novel dual probe AFM system is proposed in this paper. A system structure with high flexibility is used in this work to create different tilting angle of each probe. With the tilting angle deciding method developed in this paper, we can estimate the effective tilting angles for scanning under different scenarios. In addition, a useful merging method is also designed in this work, which can stich result from different scanning unit together and produce high-precision scanning results. Experimental results are shown to validate the outstanding capability of the proposed system and methods.

KW - Atomic force microscopy (AFM)

KW - Dual-probe AFM

KW - High-precision scanning

KW - Merging method

KW - Tilting angle

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Y2 - 15 December 2014 through 17 December 2014

ER -

Lin YT, Lo YT, Wu JW, Liu WC, Fu LC. A dual probes AFM system with effective tilting angles to achieve high-precision scanning. In 53rd IEEE Conference on Decision and Control,CDC 2014. February ed. Institute of Electrical and Electronics Engineers Inc. 2014. p. 6801-6806. 7040457. (Proceedings of the IEEE Conference on Decision and Control; February). doi: 10.1109/CDC.2014.7040457

A dual probes AFM system with effective tilting angles to achieve high-precision scanning

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Keywords

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