A CMOS-MEMS Three-Axis Magnetic Sensor with a Ferromagnetic Concentrator

Yun Wen Lai, Yu Lin Yang, Shih Jui Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This study proposes a three-axis capacitive Lorentz force magnetic field sensor based on a 0.18 μm CMOS process. By integrating two different capacitance structures, this design can detect both out-of-plane and in-plane motion, respectively, and thus can measure three-axis magnetic fields. In addition, ferromagnetic materials are added to the chip to focus out-of-plane magnetic fields and improve sensitivity. This sensor can be used as a current sensor for IOT devices.

Original languageEnglish
Title of host publication2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1547-1550
Number of pages4
ISBN (Electronic)9784886864352
StatePublished - 2023
Event22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan
Duration: 25 Jun 202329 Jun 2023

Publication series

Name2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/TerritoryJapan
CityKyoto
Period25/06/2329/06/23

Keywords

  • CMOS MEMS
  • Lorentz force
  • sensor

Fingerprint

Dive into the research topics of 'A CMOS-MEMS Three-Axis Magnetic Sensor with a Ferromagnetic Concentrator'. Together they form a unique fingerprint.

Cite this